Application of Film Bulk Acoustic Wave Resonator for Sensitive Mass Sensor
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Transactions of the Materials Research Society of Japan
سال: 2008
ISSN: 1382-3469,2188-1650
DOI: 10.14723/tmrsj.33.889